Micromachined Accelerometers With Optical Interferometric...

Journal of Microelectromechanical Systems 2008 / 02 Vol. 17; Iss. 1

Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation

Hall, N.A., Okandan, M., Littrell, R., Serkland, D.K., Keeler, G.A., Peterson, K., Bicen, B., Garcia, C.T., Degertekin, F.L.
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Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.910243
Date:
February, 2008
File:
PDF, 974 KB
english, 2008
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