![](/img/cover-not-exists.png)
[IEEE 2009 IEEE International Interconnect Technology Conference - IITC - Sapporo, Japan (2009.06.1-2009.06.3)] 2009 IEEE International Interconnect Technology Conference - Novel dielectric deposition technology for advanced interconnect with air gap
Faguet, Jacques, Lee, Eric, Liu, Junjun, Brcka, Jozef, Akiyama, OsayukiYear:
2009
Language:
english
DOI:
10.1109/iitc.2009.5090333
File:
PDF, 435 KB
english, 2009