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[IEEE 2009 IEEE International Interconnect Technology Conference - IITC - Sapporo, Japan (2009.06.1-2009.06.3)] 2009 IEEE International Interconnect Technology Conference - Novel dielectric deposition technology for advanced interconnect with air gap

Faguet, Jacques, Lee, Eric, Liu, Junjun, Brcka, Jozef, Akiyama, Osayuki
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Year:
2009
Language:
english
DOI:
10.1109/iitc.2009.5090333
File:
PDF, 435 KB
english, 2009
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