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Proton-exchanged wet etching of recessed-structure SAW filter
Shih-Hung Tsai,, Na-Fu Wang,, Mau-Phon Houng,, Yeong-Her Wang,Volume:
50
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2003.1235335
Date:
September, 2003
File:
PDF, 298 KB
english, 2003