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[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - A process to reduce the occurrence of metal extrusions in al interconnects
Adderly, Shawn A., Gambino, Jeffrey P., Sullivan, Timothy D., Moon, Matthew D., Speranza, Anthony C., Bowe, Nathaniel W., Thomas, David C.Year:
2013
Language:
english
DOI:
10.1109/asmc.2013.6552794
File:
PDF, 333 KB
english, 2013