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[IEEE Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland (21-25 Jan 2001)] Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - Micromachined tools for nano technology. Twin nano-probes and nano-scale gap control by integrated microactuators
Kakushima, K., Mita, M., Kobayashi, D., Hashiguchi, G., Endo, J., Wada, Y., Fujita, H.Year:
2001
Language:
english
DOI:
10.1109/memsys.2001.906536
File:
PDF, 505 KB
english, 2001