The Removal of Airborne Molecular Contamination in...

IEEE Transactions on Semiconductor Manufacturing 2004 / 05 Vol. 17; Iss. 2

The Removal of Airborne Molecular Contamination in Cleanroom Using PTFE and Chemical Filters

Yeh, C.-F., Hsiao, C.-W., Lin, S.-J., Hsieh, C.-M., Kusumi, T., Aomi, H., Kaneko, H., Dai, B.-T., Tsai, M.-S.
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Volume:
17
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2004.826957
Date:
May, 2004
File:
PDF, 585 KB
english, 2004
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