Nanoporous SiCOH/CxHy dual phase films with an ultralow...

Journal of Materials Chemistry C 2013 Vol. 1; Iss. 21

Nanoporous SiCOH/CxHy dual phase films with an ultralow dielectric constant and a high Young's modulus

Park, Jong-Min, Choi, Jong Kil, An, Cheng Jin, Jin, Ming Liang, Kang, Sangwoo, Yun, Juyoung, Kong, Byung-Seon, Jung, Hee-Tae
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Volume:
1
Year:
2013
Language:
english
Journal:
Journal of Materials Chemistry C
DOI:
10.1039/c3tc00587a
File:
PDF, 648 KB
english, 2013
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