The growth of ErxGa2?xO3 films by atomic layer deposition from two different precursor systems
Dezelah, Charles L., Myllym?ki, Pia, P?iv?saari, Jani, Arstila, Kai, Niinist?, Lauri, Winter, Charles H.Volume:
17
Year:
2007
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/b616443a
File:
PDF, 392 KB
english, 2007