Modeling and Forecasting of Defect-Limited Yield in...

IEEE Transactions on Semiconductor Manufacturing 2008 / 11 Vol. 21; Iss. 4

Modeling and Forecasting of Defect-Limited Yield in Semiconductor Manufacturing

Baron, Michael, Takken, Asya, Yashchin, Emmanuel, Lanzerotti, Mary
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Volume:
21
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2008.2005373
Date:
November, 2008
File:
PDF, 476 KB
english, 2008
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