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[IEEE ESSDERC 2013 - 43rd European Solid State Device Research Conference - Bucharest, Romania (2013.09.16-2013.09.20)] 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal gate MOSFETs
Dentoni Litta, Eugenio, Hellstrom, Per-Erik, Ostling, MikaelYear:
2013
Language:
english
DOI:
10.1109/essderc.2013.6818842
File:
PDF, 799 KB
english, 2013