Design, Fabrication, and Performance of a Piezoelectric...

Journal of Microelectromechanical Systems 2009 / 06 Vol. 18; Iss. 3

Design, Fabrication, and Performance of a Piezoelectric Uniflex Microactuator

Kommepalli, H.K.R., Yu, H.G., Muhlstein, C.L., Trolier-McKinstry, S., Rahn, C.D., Tadigadapa, S.A.
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Volume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2009.2015480
Date:
June, 2009
File:
PDF, 1.14 MB
english, 2009
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