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[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - A high voltage solar cell array as an electrostatic MEMS power supply
Lee, J.B., Zizhang Chen,, Allen, M.G., Rohatgi, A., Ayra, R.Year:
1994
Language:
english
DOI:
10.1109/memsys.1994.555833
File:
PDF, 581 KB
english, 1994