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Chemically amplified phenolic fullerene electron beam resist
Yang, D. X., Frommhold, A., Xue, X., Palmer, R. E., Robinson, A. P. G.Volume:
2
Year:
2014
Language:
english
Journal:
Journal of Materials Chemistry C
DOI:
10.1039/c3tc31896f
File:
PDF, 885 KB
english, 2014