[IEEE 2007 IEEE International Electron Devices Meeting - Washington, DC, USA (2007.12.10-2007.12.12)] 2007 IEEE International Electron Devices Meeting - A predictive analytical model of 3D MIM capacitors for RC IC
Segura, Noel, Cremer, Sebastien, Gloria, Daniel, Ciampolini, Lorenzo, Picollet, Eric, Minondo, MichelYear:
2007
Language:
english
DOI:
10.1109/iedm.2007.4418998
File:
PDF, 3.16 MB
english, 2007