[IEEE 2008 International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA) - Hsinchu, Taiwan (2008.04.21-2008.04.23)] 2008 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) - Integration of Millisecond Flash Anneal on CMOS Devices for DRAM Manufacturing
Lin, Shian-Jyh, Lai, Chao-Sung, Chen, Sheng-Tsung, Chen, Yi-Jung, Huang, Brady, Shih, Neng-Tai, Lee, Chung-Yuan, Lee, Pei-IngYear:
2008
Language:
english
DOI:
10.1109/vtsa.2008.4530817
File:
PDF, 1.34 MB
english, 2008