Fabrication of highly ordered silicon pin-in-a-hole nanostructures via chemical etching of nanopatterned polymer masks
Park, Hyungmin, Choi, Sinho, Lee, Jung-Pil, Park, SoojinVolume:
21
Year:
2011
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/c1jm10812c
File:
PDF, 448 KB
english, 2011