PECVD SiO2/Si3N4 double layers electrets on glass substrate

IEEE Transactions on Dielectrics and Electrical Insulation 2008 / 08 Vol. 15; Iss. 4

PECVD SiO2/Si3N4 double layers electrets on glass substrate

Zhiyu Chen,, Zhiqiu Lv,, Jinwen Zhang,
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Volume:
15
Language:
english
Journal:
IEEE Transactions on Dielectrics and Electrical Insulation
DOI:
10.1109/tdei.2008.4591210
Date:
August, 2008
File:
PDF, 729 KB
english, 2008
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