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PECVD SiO2/Si3N4 double layers electrets on glass substrate
Zhiyu Chen,, Zhiqiu Lv,, Jinwen Zhang,Volume:
15
Language:
english
Journal:
IEEE Transactions on Dielectrics and Electrical Insulation
DOI:
10.1109/tdei.2008.4591210
Date:
August, 2008
File:
PDF, 729 KB
english, 2008