Nanoporous silicon nitride membranes fabricated from porous nanocrystalline silicon templates
DesOrmeaux, J. P. S., Winans, J. D., Wayson, S. E., Gaborski, T. R., Khire, T. S., Striemer, C. C., McGrath, J. L.Volume:
6
Language:
english
Journal:
Nanoscale
DOI:
10.1039/c4nr03070b
Date:
July, 2014
File:
PDF, 1.04 MB
english, 2014