[IEEE XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. ISDEIV. - Yalta, Crimea (Sept. 27 - Oct. 1, 2004)] XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. - Properties of DLC films deposited by the pulsed are ion source
Cai Changlong,, Mi Qian,, Wang Jimei,, Ma Weihong,, Xu Junqi,, Yan Yixin,Volume:
2
Year:
2004
Language:
english
DOI:
10.1109/deiv.2004.1422661
File:
PDF, 196 KB
english, 2004