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[IEEE IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005. - Munich, Germany (11-12 April 2005)] IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005. - Enabling remote operations and cycle time reduction via automated lot-equipment assignments
Bala Iyer,, Joseph J. Concelman,, Thomas Jefferson,, Robert A. Madson,, Jason M. Trujillo,Year:
2005
Language:
english
DOI:
10.1109/asmc.2005.1438807
File:
PDF, 1.30 MB
english, 2005