[RTP 9th International Conference on Advanced Thermal Processing of Semiconductors. RTP 2001 - Anchorage, AK, USA (25-29 Sept. 2001)] 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 - A novel in-situ lightpipe pyrometer calibration technique
Hunter, A., Adams, B., Rubinchik, A., Pham, G.Year:
2001
Language:
english
DOI:
10.1109/rtp.2001.1013762
File:
PDF, 315 KB
english, 2001