Physical Characterization of PECVD and PEALD Ru(-C) Films...

Journal of The Electrochemical Society 2012 Vol. 159; Iss. 2

Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties

Wojcik, H., Junige, M., Bartha, W., Albert, M., Neumann, V., Merkel, U., Peeva, A., Gluch, J., Menzel, S., Munnik, F., Liske, R., Utess, D., Richter, I., Klein, C., Engelmann, H. J., Ho, P., Hossbach,
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Volume:
159
Year:
2012
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.066202jes
File:
PDF, 596 KB
english, 2012
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