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[IEEE IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - San Francisco, CA, USA (Dec. 13-15, 2004)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - High performance multi-bit nonvolatile HfO/sub 2/ nanocrystal memory using spinodal phase separation of hafnium silicate
Yu-Hsien Lin,, Chao-Hsin Chien,, Ching-Tzung Lin,, Ching-Wei Chen,, Chun-Yen Chang,, Tan-Fu Lei,Year:
2004
Language:
english
DOI:
10.1109/iedm.2004.1419387
File:
PDF, 234 KB
english, 2004