[IEEE IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - San Francisco, CA, USA (Dec. 13-15, 2004)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - High performance multi-bit nonvolatile HfO/sub 2/ nanocrystal memory using spinodal phase separation of hafnium silicate

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