Use of adaptive network fuzzy inference system to predict...

Use of adaptive network fuzzy inference system to predict plasma charging damage on electrical MOSFET properties

Byungwhan Kim, Hee Ju Kwon, Seongjin Choi
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Volume:
36
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.eswa.2008.07.034
File:
PDF, 234 KB
english, 2009
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