Ex situ vapor phase boron doping of silicon nanowires using BBr3
Doerk, Gregory S., Lestari, Gabriella, Liu, Fang, Carraro, Carlo, Maboudian, RoyaVolume:
2
Year:
2010
Language:
english
Journal:
Nanoscale
DOI:
10.1039/c0nr00127a
File:
PDF, 455 KB
english, 2010