Determination of Ultratrace Amounts of Metallic and Chloride Ion Impurities in Organic Materials for Microelectronics Devices After a Microwave Digestion Method
Takenaka, Miyuki, Kozuka, Shoji, Hayashi, Masaru, Endo, HiroshiVolume:
122
Year:
1997
Language:
english
Journal:
The Analyst
DOI:
10.1039/a604802a
File:
PDF, 89 KB
english, 1997