[IEEE 1991 IEEE International SOI Conference - Vail Valley, CO, USA (1-3 Oct. 1991)] 1991 IEEE International SOI Conference Proceedings - Effect of rapid thermal plus conventional annealing on the microstructure of oxygen implanted SOI material
Krause, S.J., Chen, B.L., El-Ghor, M.K.Year:
1991
Language:
english
DOI:
10.1109/soi.1991.162883
File:
PDF, 238 KB
english, 1991