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[IEEE 2004 IEEE International SOI Conference - Charleston, SC, USA (4-7 Oct. 2004)] 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573) - Smart Cut/spl trade/ transfer of 300 mm [110] and (100) Si layers for hybrid orientation technology
Bourdelle, K.K., Akatsu, T., Sousbie, N., Letertre, F., Delprat, D., Neyret, E., Ben Mohamed, N., Suciu, G., Lagahe-Blanchard, C., Beaumont, A., Charvet, A.-M., Papon, A.-M., Kernevez, N., Maleville,Year:
2004
Language:
english
DOI:
10.1109/soi.2004.1391572
File:
PDF, 138 KB
english, 2004