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[IEEE 2006 Thirty-First IEEE/CPMT International Electronics Manufacturing Technology Symposium - Petaling Jaya, Malaysia (2007.11.8-2007.11.10)] 2006 Thirty-First IEEE/CPMT International Electronics Manufacturing Technology Symposium - Wafer Scale Encapsulation of Wide Gaps using oxidation of Sacrificial Beams
Ayanoor-vitikkate, Vipin, Chen, Kuan-lin, Park, Woo-Tae, Yama, Gary, Kenny, Thomas WYear:
2006
Language:
english
DOI:
10.1109/iemt.2006.4456470
File:
PDF, 5.21 MB
english, 2006