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A novel planarization method based on photoinduced confined chemical etching
Fang, Qiuyan, Zhou, Jian-Zhang, Zhan, Dongping, Shi, Kang, Tian, Zhao-Wu, Tian, Zhong-QunVolume:
49
Year:
2013
Language:
english
Journal:
Chemical Communications
DOI:
10.1039/c3cc42368a
File:
PDF, 1.56 MB
english, 2013