Hierarchical fuzzy clustering decision tree for classifying recipes of ion implanter
Shih-Cheng Horng, Feng-Yi Yang, Shieh-Shing LinVolume:
38
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.eswa.2010.07.076
File:
PDF, 814 KB
english, 2011