![](/img/cover-not-exists.png)
[IEEE 2006 8th Electronics Packaging Technology Conference - Singapore (2006.12.6-2006.12.8)] 2006 8th Electronics Packaging Technology Conference - Comparison study from sputtering, sol-gel, and ALD processes developing embedded thin film capacitors
Ahn, Jinyong, Lee, Joseph, Kim, Joonsung, Yoo, Jegwang, Ryu, ChangsupYear:
2006
Language:
english
DOI:
10.1109/eptc.2006.342683
File:
PDF, 342 KB
english, 2006