![](/img/cover-not-exists.png)
[IEEE 2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2009.07.1-2009.07.6)] 2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices - Thin films of (HfO2)x(Al2O3)1−x alloys: Preparation, chemical structure and dielectric properties
Lebedev, Mikhail S., Smirnova, Tamara P., Kaichev, Vasily V.Year:
2009
Language:
english
DOI:
10.1109/edm.2009.5173920
File:
PDF, 1.32 MB
english, 2009