[IEEE Digest of Technical Papers.1990 Symposium on VLSI...

  • Main
  • [IEEE Digest of Technical Papers.1990...

[IEEE Digest of Technical Papers.1990 Symposium on VLSI Technology - Honolulu, Hawaii, USA (1990.06.4-1990.06.7)] Digest of Technical Papers.1990 Symposium on VLSI Technology - Selective and nonselective deposition of aluminum by LPCVD using DMAH and microregion observation of single crystal aluminum with scanning μ-RHEED microscope

Tsubouchi, K., Masu, K., Shigeeda, N., Matano, T., Hiura, Y., Mikoshiba, N., Matsumoto, S., Asaba, T., Marui, T., Kajikawa, T.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
1990
Language:
english
DOI:
10.1109/vlsit.1990.110980
File:
PDF, 242 KB
english, 1990
Conversion to is in progress
Conversion to is failed