[IEEE Digest of Technical Papers.1990 Symposium on VLSI Technology - Honolulu, Hawaii, USA (1990.06.4-1990.06.7)] Digest of Technical Papers.1990 Symposium on VLSI Technology - Selective and nonselective deposition of aluminum by LPCVD using DMAH and microregion observation of single crystal aluminum with scanning μ-RHEED microscope
Tsubouchi, K., Masu, K., Shigeeda, N., Matano, T., Hiura, Y., Mikoshiba, N., Matsumoto, S., Asaba, T., Marui, T., Kajikawa, T.Year:
1990
Language:
english
DOI:
10.1109/vlsit.1990.110980
File:
PDF, 242 KB
english, 1990