[IEEE 2013 2nd Experiment@ International Conference (exp.at'13) - Coimbra (2013.9.18-2013.9.20)] 2013 2nd Experiment@ International Conference (exp.at'13) - The remote plasma nanotecnologies laboratory for experimental research and practical training
Zimin, Alexander, Shumov, Andrey, Krivitskiy, Semen, Troynov, VladislavYear:
2013
Language:
english
DOI:
10.1109/expat.2013.6703042
File:
PDF, 2.87 MB
english, 2013