Vibration modes of a resonant silicon tube density sensor

Vibration modes of a resonant silicon tube density sensor

Enoksson, P., Stemme, G., Stemme, E.
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Volume:
5
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.485214
Date:
March, 1996
File:
PDF, 842 KB
english, 1996
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