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[IEEE 2011 IEEE International Ultrasonics Symposium (IUS) - Orlando, FL, USA (2011.10.18-2011.10.21)] 2011 IEEE International Ultrasonics Symposium - Deposition of crack-free 30 µm AlN on IDT/ZnO/Si for wave guiding layer acoustic wave applications
Legrani, O., Elmazria, O., Pigeat, P., Bartasyte, A., Zhgoon, S., Talbi, A.Year:
2011
Language:
english
DOI:
10.1109/ultsym.2011.0574
File:
PDF, 695 KB
english, 2011