[IEEE 2008 International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM) - Smolenice, Slovakia (2008.10.12-2008.10.16)] 2008 International Conference on Advanced Semiconductor Devices and Microsystems - Hydrogenated Amorphous Carbon Films Prepared by Plasma-enhanced Chemical Vapor Deposition
Huran, J., Kobzev, A.P., Balalykin, N.I., Pezoltd, J.Year:
2008
Language:
english
DOI:
10.1109/asdam.2008.4743297
File:
PDF, 1.08 MB
english, 2008