[IEEE 2005 IEEE International Conference on Mechatronics and Automation - Niagara Falls, Ont., Canada (29 July-1 Aug. 2005)] IEEE International Conference Mechatronics and Automation, 2005 - A research on high-Q micromechanical resonator fabricating process and micro-check
Shusong Peng,, Dagui Huang,, Zheng Dong,, Min Chen,Volume:
4
Year:
2005
Language:
english
DOI:
10.1109/icma.2005.1626815
File:
PDF, 183 KB
english, 2005