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[IEEE 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers. - Honolulu, HI, USA (June 13-15, 2006)] 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers. - Newly Found Anomalous Gate Leakage Current (AGLC) for 65 nm Node and Beyond, and Its Countermeasure Using Nitrogen Implanted Poly-Si
Togo, M., Suzuki, T., Hasegawa, E., Koyama, S., Fukai, T., Sakakidani, A., Miyake, S., Watanabe, T., Yamamoto, I., Tanaka, M., Kawashima, Y., Kunimune, Y., Ikeda, M., Imai, K.Year:
2006
Language:
english
DOI:
10.1109/vlsit.2006.1705201
File:
PDF, 829 KB
english, 2006