Microfabrication of cavities in polydimethylsiloxane using...

Lab on a Chip 2007 Vol. 7; Iss. 12

Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds

Giang, Ut-Binh T., Lee, Dooyoung, King, Michael R., DeLouise, Lisa A.
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Volume:
7
Year:
2007
Language:
english
Journal:
Lab on a Chip
DOI:
10.1039/b714742b
File:
PDF, 307 KB
english, 2007
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