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[IEEE 2014 IEEE 21st International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Marina Bay Sands, Singapore (2014.6.30-2014.7.4)] Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Advanced TEM applications in semiconductor devices
Du, A. Y., Zhu, J., Zhou, Y. K., Liu, B. H., Er, Eddie, Mo, Z. Q., Zhao, S. P., Lam, JeffreyYear:
2014
DOI:
10.1109/ipfa.2014.6898193
File:
PDF, 2.63 MB
2014