A comparative thermogravimetric study of polymers designed as dry-developing photoresists
Syed Nawazish Ali, Shakour Ghafouri, Zhihui Yin, Pablo Froimowicz, Sabira Begum, Mitchell A WinnikVolume:
44
Year:
2008
Language:
english
Pages:
10
DOI:
10.1016/j.eurpolymj.2008.09.004
File:
PDF, 494 KB
english, 2008