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Stochastic modeling and simulation of photoresist surface and line-edge roughness evolution
G.P. Patsis, D. Drygiannakis, V. Constantoudis, I. Raptis, E. GogolidesVolume:
46
Year:
2010
Language:
english
Pages:
12
DOI:
10.1016/j.eurpolymj.2010.07.002
File:
PDF, 1.86 MB
english, 2010