Fabrication of BAW Resonators Based on Piezoelectric AlN...

Ferroelectrics 2009 / 10 Vol. 389; Iss. 1

Fabrication of BAW Resonators Based on Piezoelectric AlN and Reflector-on-Membrane Structure

Altamura, Davide, Pomarico, Anna, Epifani, Gianmichele, Ingrosso, Ilaria, Todaro, Maria Teresa, Tasco, Vittorianna, De Vittorio, Massimo, Passaseo, Adriana
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Volume:
389
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150190902987640
Date:
October, 2009
File:
PDF, 1.61 MB
english, 2009
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