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Fabrication of BAW Resonators Based on Piezoelectric AlN and Reflector-on-Membrane Structure
Altamura, Davide, Pomarico, Anna, Epifani, Gianmichele, Ingrosso, Ilaria, Todaro, Maria Teresa, Tasco, Vittorianna, De Vittorio, Massimo, Passaseo, AdrianaVolume:
389
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150190902987640
Date:
October, 2009
File:
PDF, 1.61 MB
english, 2009