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[IEEE 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Portland, OR, USA (28-30 Sept. 2004)] 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004. - Wafer temperature non-uniformity due to volumetric absorption of radiation
Lojek, B.Year:
2004
Language:
english
DOI:
10.1109/rtp.2004.1441966
File:
PDF, 611 KB
english, 2004