In-situ measurement of wet stiction at HDI and whole...

IEEE Transactions on Magnetics 1993 / Nov. Vol. 29; Iss. 6

In-situ measurement of wet stiction at HDI and whole surface mapping for glide height lower than 500 angstroms

Chen, G.-L., Xuan, J., Truong, T., Sugiyama, T.
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Volume:
29
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.281357
Date:
January, 1993
File:
PDF, 345 KB
english, 1993
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