![](/img/cover-not-exists.png)
[IEEE 1992 Symposium on VLSI Technology Digest of Technical Papers - Seattle, WA, USA (2-4 June 1992)] 1992 Symposium on VLSI Technology Digest of Technical Papers - An ultra high speed ECL-bipolar CMOS technology with silicon fillet self-aligned contacts
Liu, T.M., Chin, G.M., Morris, M.D., Jeon, D.Y., Archer, V.D., Kim, H.H., Cerullo, M., Lee, K.F., Sung, J.M., Lau, K., Chiu, T.Y., Voshchenkov, A.M., Swartz, R.G.Year:
1992
Language:
english
DOI:
10.1109/vlsit.1992.200631
File:
PDF, 188 KB
english, 1992