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[IEEE 11th International Symposium on Power Semiconductor Devices and ICs. ISPSD '99 - Toronto, Ont., Canada (26-28 May 1999)] 11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312) - Industrial relevance of deep junctions produced by rapid thermal processing for power integrated circuits
Dilhac, J.-M., Cornibert, L., Morillon, B., Roux, S., Ganibal, C.Year:
1999
Language:
english
DOI:
10.1109/ispsd.1999.764107
File:
PDF, 558 KB
english, 1999