Tribological characteristics of SiN/sub x/ films

IEEE Transactions on Magnetics 1999 / Sept. Vol. 35; Iss. 5

Tribological characteristics of SiN/sub x/ films

Jianming Wen,, Xiao Ying,, King Wong,, Barth, G., GaLane Chen,
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Volume:
35
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.800824
Date:
January, 1999
File:
PDF, 577 KB
english, 1999
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